| 摘要 |
<p>PURPOSE:To obtain an inexpensive piezo-electric element having a superior piezo-electricity by forming a metallic film on a substrate that a grating is formed, forming a piezo-electric thin film on the metallic film and forming an upper electrode on a piezo-electric body. CONSTITUTION:A substrate 1 is made of a cylindrical silica glass having the both end surfaces of which are polished optically. A mask pattern is made on one side of the end surfaces by using the interference light of laser beam and a crest-shaped grating 2 is formed by an ion milling method. After that, about 100nm of a platinum electrode film 3 is vapor-deposited, as a lower electrode, on the substrate 1 in which the grating 2 is formed. Continuously, a thin film 4 which is made of lead titate used as a principal ingredient is formed, as the piezoelectric body, on the electrode film 3 by a high frequency magnetron sputtering. Furthermore, chromium and gold are vapor-deposited on the thin film 4 as an upper electrode 5 by using a mask of 5mmphi. Thereafter, D.C voltage of 100KV/cm is applied on the both electrodes maintaining a sample temperature at 200 deg.C for 20min and a polarization is processed.</p> |
