TARGET HOLDING APPARATUS FOR CATHODE SPUTTERING,申请号JP19860072636-传众专利搜索

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发明名称	TARGET HOLDING APPARATUS FOR CATHODE SPUTTERING
摘要
申请公布号	JPS61231171(A)	申请公布日期	1986.10.15
申请号	JP19860072636	申请日期	1986.04.01
申请人	BALZERS AG	发明人	URUSU BEEKUMAN;EDOUARUTO RIRE;PIUSU GURIYUUNENFUERUDAA
分类号	C23C14/34;H01J37/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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