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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6240716(A)
申请公布日期
1987.02.21
申请号
JP19850178625
申请日期
1985.08.15
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
MOGAMI TORU
分类号
H01L27/00;H01L21/20;H01L21/263;H01L21/84
主分类号
H01L27/00
代理机构
代理人
主权项
地址
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