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发明名称
摘要
申请公布号
JPS6238852(B2)
申请公布日期
1987.08.20
申请号
JP19770120937
申请日期
1977.10.11
申请人
HITACHI LTD
发明人
KAMIGAKI YOSHIAKI;HASEGAWA NOBUO;ITO KYOO;KAWAMOTO YOSHIFUMI;HASHIMOTO TETSUKAZU
分类号
H01L21/30;H01L21/027;H01L21/302;H01L21/306;H01L21/8234;H01L27/06
主分类号
H01L21/30
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