发明名称 PROCESS FOR PRODUCING MONOCRYSTALLINE LAYER ON INSULATOR
摘要 A process for producing a monocrystalline layer on an insulator, particularly in a semiconductor wafer adapted for use to produce large-scale integrated circuits, comprising the steps of providing a nonmonocrystalline layer on an insulator and heating a region of the nonmonocrystalline layer by irradiating it from two heat sources while moving the heat sources relative to the nomonocrystalline layer, thereby locally melting and transforming the nonmonocrystalline layer to a monocrystalline layer.
申请公布号 DE3465829(D1) 申请公布日期 1987.10.08
申请号 DE19843465829 申请日期 1984.03.28
申请人 FUJITSU LIMITED 发明人 SAKURAI, JUNJI
分类号 C30B13/00;C30B13/24;H01L21/20;H01L21/26;H01L21/268;H01L21/324 主分类号 C30B13/00
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