| 摘要 |
PURPOSE:To suppress a variation in the distance between a semiconductor laser and a waveguide and to stabilize oscillation wavelength by arranging the semiconductor laser and waveguide on the same semiconductor substrate. CONSTITUTION:An interference type pressure sensor element made of LiNbO3 24 as a dielectric is fixed on a mount base 23 made of an Si substrate. The waveguide 25 made of a dielectric is formed in an X shape on the LiNbO3 substrate 24 by Ti diffusion and a high reflecting film 27 is formed on one surface of the LiNbO3. The semiconductor laser 21, on the other hand, is fixed on the Si substrate (mount base) 23 through a subordinate mount 22 of silicon. Projection light from the semiconductor laser 21 is guided in the waveguide 25. Part of the projection light is reflected by an end surface of the waveguide and returned to the semiconductor laser. Thus, the semiconductor laser 21 and waveguide 25 are provided on the same support base 23, so the variation in the distance between the semiconductor laser 21 and waveguide is suppressed and the oscillation wavelength is stabilized. |
