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发明名称
SEMICONDUCTOR LOGIC INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6417460(A)
申请公布日期
1989.01.20
申请号
JP19870173362
申请日期
1987.07.11
申请人
NEC CORP
发明人
KAGA MASAKAZU
分类号
H01L21/66;H01L21/822;H01L27/04
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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