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发明名称
FREMGANGSMAADE TIL PLASMA-AFLEJRING AF MULTIPLE LAG AF AMORFT MATERIALE OG MED VARIABEL SAMMENSAETNING
摘要
申请公布号
DK562789(A)
申请公布日期
1990.05.26
申请号
DK19890005627
申请日期
1989.11.10
申请人
ENIRICERCHE S.P.A.;AGIP S.P.A.
发明人
SALA, DARIO DELLA;OSTRIFATE, CIRO
分类号
H01L21/205;C23C16/22;C23C16/515;C23C16/52;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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