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发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
JPH02246215(A)
申请公布日期
1990.10.02
申请号
JP19890066119
申请日期
1989.03.20
申请人
HITACHI LTD
发明人
SASAKI ICHIRO;OTSUBO TORU
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
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