ION INJECTION APPARATUS,申请号JP19890087528-传众专利搜索

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发明名称	ION INJECTION APPARATUS
摘要
申请公布号	JPH02265156(A)	申请公布日期	1990.10.29
申请号	JP19890087528	申请日期	1989.04.05
申请人	NEC CORP	发明人	SUZUKI HIDEKI
分类号	H01J37/317;H01L21/265;(IPC1-7):H01J37/317	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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