| 摘要 |
A system for determining probe tip alignment for a probe card having a plurality of probes downwardly extending in a defined region of the probe card. Each probe has a tip assigned to a precise X, Y position in a plane spaced from the probe card. The assigned X, Y position is dictated by the topology of the integrated circuit chip for which the probe card was designed. A first memory stores the assigned X, Y position for each of the tips, a second memory stores the measured location of the plane that each of the tips is found in, and a sensor measures the actual X, Y position of an individual probe tip. The sensor is moved to the measured plane at the assigned X, Y position for each tip and obtaining, for each tip, a meausred X, Y position. A computer then displays in a monitor by means of suitable icons, all probes which have a measured X, Y position within an acceptable window of the assigned X, Y position and then displays, with suitable icons, all probe tips having a measured X, Y position exceeding the window of acceptability.
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