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发明名称
SEMICONDUCTOR DEVICE USING CHARGE STORAGE UNIT OF LAMINATED STRUCTURE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03284873(A)
申请公布日期
1991.12.16
申请号
JP19900086272
申请日期
1990.03.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
KIMURA MIKIHIRO
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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