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发明名称
AUTOMATIC STARTING CIRCUIT DEVICE FOR SPUTTER ION PUMP
摘要
申请公布号
JPH0410348(A)
申请公布日期
1992.01.14
申请号
JP19900110429
申请日期
1990.04.27
申请人
ULVAC JAPAN LTD
发明人
UEDA YASUTERU
分类号
H01J41/18
主分类号
H01J41/18
代理机构
代理人
主权项
地址
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