VERFAHREN ZUR HERSTELLUNG EINER DIAMANTENSCHICHT.

摘要

A method of forming a diamond film (20) on a substrate (2) comprises the steps of depositing carbon on said substrate (2) in vacuum by vapor deposition, and irradiating accelerated ions (12) onto said substrate, said ions being obtained by ionizing a gas (G) composed of at least one of hydrogen gas, inert gases, hydrocarbon gases, organic compound gases and silicon base gases.