| 主权项 |
1. A magnetic annealing apparatus comprising:
a carrier conveyance region where one or more carriers that accommodate a group of workpieces to be processed are conveyed; a workpiece conveyance region where the workpieces are conveyed; an opening/closing door interposed between the carrier conveyance region and the workpiece conveyance region; and a control unit, wherein the carrier conveyance region includes: a first mounting table on which a carrier to be carried into the magnetic annealing apparatus is disposed; a plurality of second mounting tables on which the carrier is disposed so as to convey the workpieces from the carrier conveyance region to the workpiece conveyance region through the opening/closing door in a hermetically sealed manner; a storage unit that stores a plurality of carriers; and a carrier conveyance mechanism configured to perform carrying-out/carrying-in of the carriers among the first mounting table, the second mounting tables, and the storage units, and wherein the workpiece conveyance region includes: an aligner device configured to align a plurality of workpieces; a workpiece boat disposed at a rear side of a cap through a heat insulation portion and configured to hold plural groups of workpieces; a workpiece conveyance mechanism configured to convey the workpieces among the carriers disposed on the second mounting tables, the aligner device, and the workpiece boat; a heating unit configured to heat the workpieces; a magnetic field generating unit including a horizontal superconducting magnet configured to apply magnetic fields to the workpieces; and a transfer mechanism configured to transfer the workpieces held by the workpiece boat into the magnetic field generating unit, wherein at least one of the cap and the heat insulation portion is provided with an angle adjusting mechanism configured to adjust an angle between a main surface of the cap and a longitudinal axis direction of the heat insulation portion in order to adjust an inclined angle of the workpiece boat, one end of the heat insulation portion being connected to the main surface of the cap and the other end of the heat insulation portion being connected to workpiece boat. |
