| 摘要 |
PROBLEM TO BE SOLVED: To provide a tracking type laser interferometer capable of restarting measurement by an easy method without adding any hardware even when tracking is disabled, and automatically resetting itself.SOLUTION: A resetting method comprises: when a measurement system using a tracking type laser interferometer 40 takes a measurement, emitting laser light 74 toward a retroreflector 42; placing the tracking type laser interferometer 40 in a tracking state; moving a moving body 22 to an arbitrary position and storing a combination of position information on the moving body 22 at the arbitrary one place and rotational position information on a two-axial rotary mechanism 80 from the tracking type interferometer 40; when a light reception quantity determination part 84 determines light quantity abnormality, holding positions of the moving body 22 and two-axial rotary mechanism 80; moving the moving body 22 and two-axial rotary mechanism 80 to the respective stored predetermined positions; and placing the tracking type laser interferometer 40 in a tracking state and restarting the measurement on condition that a light reception quantity is not abnormal after the movement.SELECTED DRAWING: Figure 2 |
