| 摘要 |
PURPOSE:To increase the pressure of an assist gas without adding a large pressurizing force to a lens and to increase the speed of laser cutting by supplying the assist gas of a high pressure from a high-pressure gas supply port into a high-pressure chamber in the state of pressurizing a middle-pressure gas. CONSTITUTION:The pressurizing gas of the middle pressure is first supplied from a middle-pressure gas supply port 14. The uniform pressurizing force is loaded by the principle of Pascal on the surfaces of a pressure partition wall 11 and the surface of the lens 7 by the supply of this middle-pressure gas. However, this pressurizing force is in the range of a permissible pressure and, therefore, the damage of the lens 7, and the pressure partition wall 11 is obviated. The assist gas of the high pressure is supplied from the high- pressure gas supply port 9 in the state of pressurizing this middle-pressure gas. The assist gas of the high pressure is ejected from an ejection hole 3 and pressurizes the surface of the lens 7. The lens 7 eventually receives the pressurizing force in the direction reverse from the pressurizing force of the middle- pressure gas by injection of the high-pressure gas. |
