Measurement method using a sensor; sensor system and sensor

摘要

Provided is a method for measurement of a change in environment at a sensor. The sensor has: a first layer formed of a piezoelectric material; a second layer formed adjacent the first layer and acoustically coupled with the first layer; and electrodes disposed to apply a driving signal to the first layer to generate bulk acoustic waves. The temperature coefficient of frequency of the first layer is different to that of the second layer. In the method, a first layer resonant frequency associated with the first layer and a combination resonant frequency associated with a combination of the first and second layers are detected. A shift in one or both of the first layer resonant frequency and the combination resonant frequency is detected. A portion of the shift caused by a temperature change at the sensor is identified. Another portion of the shift caused by an environmental change at the sensor other than the temperature change is identified. Also provided is a corresponding sensor and sensor system operable to carry out the method.

主权项

1. A method for measurement of a change in environment at a sensor, the method including the step of providing the sensor having:
a first layer formed of a piezoelectric material; a second layer formed adjacent the first layer and acoustically coupled with the first layer; and electrodes disposed to apply a driving signal to the first layer to generate bulk acoustic waves,wherein a temperature coefficient of frequency of the first layer is different to that of the second layer,the method further including the steps:
detecting a first layer resonant frequency associated with the first layer and a combination resonant frequency associated with a combination of the first and second layers; detecting a shift in one or both of the first layer resonant frequency and the combination resonant frequency; identifying a portion of the shift caused by a temperature change at the sensor; and identifying another portion of the shift caused by an environmental change at the sensor other than the temperature change.