发明名称 |
One-sided ozone TEOS spacer |
摘要 |
The present invention provides a programmable structure for a programmable read-only memory (PROM) which utilizes one-sided ozone spacers constructed on the digit lines as one time programmable nodes. An oxide/nitride/oxide layer (ONO) is used as an interface between underlying parallel rows of digit lines, having one-sided ozone spacers, and overlying parallel columns of word lines in a programmable read only memory With a each digit line passing under each word line in a row/column matrix is formed thereby providing a programmable digit/word line matrix. Each crossing point of the digit and word lines in the matrix will be permanently programmed to either a one or a zero by rupturing the thin ONO dielectric interface by applying the appropriate voltage potential between the associated digit/word line conductors.
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申请公布号 |
US5286993(A) |
申请公布日期 |
1994.02.15 |
申请号 |
US19920855810 |
申请日期 |
1992.03.23 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
LOWREY, TYLER A.;LEE, RUOJIA |
分类号 |
H01L21/316;H01L21/768;H01L21/8246;H01L23/525;(IPC1-7):H01L27/02;G11C17/00 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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