发明名称 Composition containing naphthoquinone diazide sulfonic acid mixed esters and radiation-sensitive recording material prepared therewith
摘要 The present invention relates to a radiation-sensitive composition containing a resinous binder which is insoluble in water, but soluble or at least swellable in aqueous alkaline solutions, at least one radiation-sensitive compound and optionally a crosslinking agent. The radiation-sensitive compound is an ester composed of a) a compound containing 2 to 6 aromatic hydroxyl groups, b) a ring-substituted (o-naphthoquinone 2-diazide)-4-sulfonic acid (diazo compound D1) and c) an (o-naphthoquinone 2-diazide)-4- or -5-sulfonic acid which is not further substituted (diazo compound D2) and/or a non-radiation-sensitive organic acid (compound D0) , where the D1:(D2 and/or D0) molar ratio is between about 0.1:1 and 30:1.
申请公布号 US5306595(A) 申请公布日期 1994.04.26
申请号 US19920862603 申请日期 1992.04.01
申请人 HOECHST AKTIENGESELLSCHAFT 发明人 SCHELER, SIEGFRIED;ZAHN, WOLFGANG;SCHMITT, AXEL;BUHR, GERHARD
分类号 G03F7/00;G03F7/022;H01L21/027;(IPC1-7):G03C1/52 主分类号 G03F7/00
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