发明名称 |
Method and apparatus to evaluate effectiveness of cleaning systems for high density electronics |
摘要 |
An apparatus and method for a cleaning process control is disclosed. The apparatus includes two parallel plates of glass that have a plurality of shims positioned therebetween and a means for clamping these plates of glass firmly against the shims. A contaminant is positioned between the plates of glass and the apparatus is cleaned using a selected cleaning process. The apparatus can then be inspected to determine the effectiveness of a particular cleaning process by peering through the transparent glass plates to inspect for any remaining contaminant. The apparatus can then be cleaned more extensively and used again to check a different cleaning process.
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申请公布号 |
US5312536(A) |
申请公布日期 |
1994.05.17 |
申请号 |
US19920935034 |
申请日期 |
1992.08.25 |
申请人 |
CERIDIAN CORPORATION |
发明人 |
PAI, DEEPAK K.;MADAY, GENE A. |
分类号 |
G01R31/28;(IPC1-7):G01N27/26 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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