发明名称 Method and apparatus to evaluate effectiveness of cleaning systems for high density electronics
摘要 An apparatus and method for a cleaning process control is disclosed. The apparatus includes two parallel plates of glass that have a plurality of shims positioned therebetween and a means for clamping these plates of glass firmly against the shims. A contaminant is positioned between the plates of glass and the apparatus is cleaned using a selected cleaning process. The apparatus can then be inspected to determine the effectiveness of a particular cleaning process by peering through the transparent glass plates to inspect for any remaining contaminant. The apparatus can then be cleaned more extensively and used again to check a different cleaning process.
申请公布号 US5312536(A) 申请公布日期 1994.05.17
申请号 US19920935034 申请日期 1992.08.25
申请人 CERIDIAN CORPORATION 发明人 PAI, DEEPAK K.;MADAY, GENE A.
分类号 G01R31/28;(IPC1-7):G01N27/26 主分类号 G01R31/28
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