ETCHING METHOD FOR METAL FILM OF COPPER OR CONTAINING COPPER AS MAIN INGREDIENT,申请号JP19920327927-传众专利搜索

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发明名称	ETCHING METHOD FOR METAL FILM OF COPPER OR CONTAINING COPPER AS MAIN INGREDIENT
摘要
申请公布号	JPH06177084(A)	申请公布日期	1994.06.24
申请号	JP19920327927	申请日期	1992.12.08
申请人	KAWASAKI STEEL CORP	发明人	YAMAMOTO HIROSHI
分类号	H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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