| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system which allows for simulated transportation of a plurality of dummy substrates in parallel in time in the system, and also allows for simulated transportation not transporting a dummy substrate into a processing chamber.SOLUTION: A condition table 122 functions as a maintenance macro setting section for selecting a maintenance macro to be executed among various maintenance macros stored in a storage device 105, and setting the execution conditions of them. A maintenance macro set by the condition table 122 is controlled together with a system recipe 130, by a control signal from a recipe execution unit 121. The recipe execution unit 121 executes the simulated operation in a substrate processing system 100, by cooperating the system recipe 130, and a maintenance macro 135 set in the condition table 122.SELECTED DRAWING: Figure 3 |
