发明名称 |
Photoionization mass spectroscopy flux monitor |
摘要 |
The present invention provides a photoionization mass spectroscopy flux monitor for gaseous species above a sample surface. It provides an in situ, real time, species specific, nonintrusive probe with a geometry compatible with conventional MBE growth chambers. Gaseous species are photoionized above a sample surface and the ionized gaseous species are extracted parallel to the sample surface and coupled into a mass spectrometer inlet adjacent to the sample surface. The geometry of the flux monitor allows for simultaneous coupling of a charged particle beam with the sample surface, for example for monitoring film growth with RHEED.
|
申请公布号 |
US5397895(A) |
申请公布日期 |
1995.03.14 |
申请号 |
US19930019854 |
申请日期 |
1993.02.19 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCE |
发明人 |
LEONE, STEPHEN R.;STRUPPP PAUL G.;SMILGYS, RUSSELL V.;ALSTRIN, APRIL L. |
分类号 |
C30B23/02;H01J49/06;H01J49/16;(IPC1-7):B01D59/44;H01J49/00 |
主分类号 |
C30B23/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|