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发明名称
SEMICONDUCTOR SUBSTRATE MATERIAL AND ITS MANUFACTURE
摘要
申请公布号
JPH0845802(A)
申请公布日期
1996.02.16
申请号
JP19940182611
申请日期
1994.08.03
申请人
NIPPON STEEL CORP
发明人
KAWAKAMI KAZUTO
分类号
H01L21/322;H01L21/02;H01L21/304;(IPC1-7):H01L21/02
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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