Micro-mechanical acceleration sensor formed by differential capacitor

摘要

The micro-mechanical acceleration sensor has a number of electrodes (4) which are able to move w.r.t a silicon substrate (1) and these are carried by a seismic mass (2) which is supported by the elastic deflection elements (3) secured to the substrate (1) by the pillars (5). Two sets of interleaving electrodes (21,22) are symmetrically positioned on the LHS of the mass (2) secured to the substrate (1) by the further pillars (5). The electrodes (21) are electrically paralleled by the connector strip (10) and the electrodes (22) are similarly connected via the conducting tracks (12). A mirror image assembly (21'22') is provided on the RHS of the mass (2) and the whole forms a differential capacitor having the connection terminals (11,12).