发明名称 |
SURFACE PROCESSING DEVICE |
摘要 |
PURPOSE: To provide a surface processing device wherein multiple processing units are efficiently assigned with no increased occupation and units are easily maintained. CONSTITUTION: An UV module 23 which is a dry process unit at upper side is moved horizontally from the operation position on a brush module 21 which is a wet process unit at lower side up to the refuge position together with a frame 25 guided by a slide guide, so that work space is formed above the brush module 21, thus, such maintenance as repair of the brush module 21 becomes possible. |
申请公布号 |
JPH0878388(A) |
申请公布日期 |
1996.03.22 |
申请号 |
JP19940210164 |
申请日期 |
1994.09.02 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
TANIGUCHI SATOSHI;SHIMA YASUMASA;SHIMAJI KATSUMI |
分类号 |
G03F7/26;H01L21/304;H01L21/306;H01L21/3065;H01L21/677;H01L21/68;(IPC1-7):H01L21/306 |
主分类号 |
G03F7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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