发明名称 SURFACE PROCESSING DEVICE
摘要 PURPOSE: To provide a surface processing device wherein multiple processing units are efficiently assigned with no increased occupation and units are easily maintained. CONSTITUTION: An UV module 23 which is a dry process unit at upper side is moved horizontally from the operation position on a brush module 21 which is a wet process unit at lower side up to the refuge position together with a frame 25 guided by a slide guide, so that work space is formed above the brush module 21, thus, such maintenance as repair of the brush module 21 becomes possible.
申请公布号 JPH0878388(A) 申请公布日期 1996.03.22
申请号 JP19940210164 申请日期 1994.09.02
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 TANIGUCHI SATOSHI;SHIMA YASUMASA;SHIMAJI KATSUMI
分类号 G03F7/26;H01L21/304;H01L21/306;H01L21/3065;H01L21/677;H01L21/68;(IPC1-7):H01L21/306 主分类号 G03F7/26
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