| 摘要 |
PURPOSE: To change the ratio of a target value on a reticle side to a target value on a wafer side so as to optimize a scanning-type aligner in its structure. CONSTITUTION: A reticle driving means 5a, a reticle position detecting means 7a, a wafer driving means 5b, a wafer position detecting means 7b, a projection means 9 which projects picture image data recorded on a reticle, a reticle target position generating means 1a, and a wafer target position generating means 1b are provided. Furthermore, control means 3a and 3b, which send not only control input signals to the reticle drive means basing on the outputs of the reticle position detecting means 7a and the reticle target position generating means 1a but also control input signals to the the wafer drive means basing on the outputs of the wafer position detecting means 7b and the wafer target position generating means 1b, are provided. Reticle target position signals and wafer target position signals outputted from the wafer target position generating means 1b and the reticle target position generating means 1a are made to serve to set a curve which indicates a target route other than a straight line connected between a start point and an end point in a graph where the positions of a reticle and a wafer are made to serve as axes. |
