发明名称 LAMINATED LAYER PIEZOELECTRIC ACTUATOR
摘要 PURPOSE: To prevent a defect in exterior part caused by extension, by providing an inner electrode exposed on a side face and limiting a resin part to a given ratio of a distance between adjoining inner electrodes. CONSTITUTION: In a glass insulation step 13, each counter electrode is constituted for each layer in a laminated piezoelectric actuator, while an inner electrode 12 exposed on a side face is connected to a pair of outer electrodes 14. A coating layer with an epoxy resin of a width of about 40μm is formed for each inner electrode on the other side in an electrodeposition method. An epoxy resin 17 as an insulating layer is formed at the inner electrode 12 in a thermal treatment step in a way that a non-coating area is formed one third or more of a length between the adjacent inner electrodes 12. Then, the piezoelectric actuator has good moisture resistance even in an extended state with a water- proof structure, in which a defect in the outer face is hardly caused.
申请公布号 JPH08335727(A) 申请公布日期 1996.12.17
申请号 JP19950166927 申请日期 1995.06.07
申请人 TOKIN CORP 发明人 SATO HIROFUMI
分类号 B23Q5/28;H01L41/083;(IPC1-7):H01L41/083 主分类号 B23Q5/28
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