MOUNTING METHOD OF WAFER

摘要

The method for mounting chemical composite wafer on plain glass substrate includes steps ; a) forming protection layer(2) against damage or crack ; b) spraying wax(3) for adhering a plain glass a substrate(4) and a wafer(1) ; and c) adhering front side of the wafer on which the protection layer is formed and the plain glass substrate coated by the wax. The protection layer formed by baking after spraying photo sensitive layer.