Method of performing spectroscopy in a transmission charged-particle microscope

摘要

A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:
a specimen holder;a source, for producing a beam of charged particles;an illuminator, for directing said beam so as to irradiate the specimen;an imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,

the method comprising:

using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array;

providing;

using a radiation sensor in said flux upstream of said aperture device to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector;

using a sensing result from said sensor to adjust a detection result from said detector.

主权项

1. A method of performing spectroscopy in a Transmission Charged-Particle Microscope including:
a specimen holder, for holding a specimen; a source, for producing a beam of charged particles; a illuminator, for directing said beam so as to irradiate the specimen; a imaging system, for directing a flux of charged particles transmitted through the specimen onto a spectroscopic apparatus comprising a dispersing device for dispersing said flux into an energy-resolved array of spectral sub-beams,the method comprising:
using an adjustable aperture device to admit a first portion of said array to a detector, while blocking a second portion of said array; providing a radiation sensor in said flux upstream of said aperture device; using said sensor to perform localized radiation sensing in a selected region of said second portion of the array, simultaneous with detection of said first portion by said detector; and using a sensing result from said sensor to adjust a detection result from said detector.