发明名称 A STATIC MEMORY STRUCTURE AND METHOD OF MANUFACTURING THE SAME
摘要 A static RAM cell is provided to improve stability of structure and prevent contamination of gate oxide. The static RAM cell including two pass transistors and two pull-down transistors comprises; a spacer(60) form at both sides of a gate oxide(56) and a gate electrode(58a,58b,58c); a resistive load layer(66) connected to a source of the pass transistor and the gate electrode(58a) via a load contact hole(64a); a conductive connecting layer(74b,74c) connected to a drain of the pull-down transistor and the gate electrode(58b) via a gate/drain contact hole(72c); and a bit-line pad layer(74a) for connecting a bit-line to the drain of the pass transistor. The load contact hole(64a) and the gate/drain contact hole(72c) is performed after forming the gate oxide(56), thereby preventing the contamination of gate oxide.
申请公布号 KR0118212(B1) 申请公布日期 1997.10.04
申请号 KR19930008144 申请日期 1993.05.12
申请人 SAMSUNG ELECTRONICS CO. 发明人 LEE, DUK-MIN;BAE, DONG-JOO;KIM, BYUNG-CHOL
分类号 H01L27/115;H01L27/11;(IPC1-7):H01L27/115 主分类号 H01L27/115
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