发明名称 |
A STATIC MEMORY STRUCTURE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A static RAM cell is provided to improve stability of structure and prevent contamination of gate oxide. The static RAM cell including two pass transistors and two pull-down transistors comprises; a spacer(60) form at both sides of a gate oxide(56) and a gate electrode(58a,58b,58c); a resistive load layer(66) connected to a source of the pass transistor and the gate electrode(58a) via a load contact hole(64a); a conductive connecting layer(74b,74c) connected to a drain of the pull-down transistor and the gate electrode(58b) via a gate/drain contact hole(72c); and a bit-line pad layer(74a) for connecting a bit-line to the drain of the pass transistor. The load contact hole(64a) and the gate/drain contact hole(72c) is performed after forming the gate oxide(56), thereby preventing the contamination of gate oxide.
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申请公布号 |
KR0118212(B1) |
申请公布日期 |
1997.10.04 |
申请号 |
KR19930008144 |
申请日期 |
1993.05.12 |
申请人 |
SAMSUNG ELECTRONICS CO. |
发明人 |
LEE, DUK-MIN;BAE, DONG-JOO;KIM, BYUNG-CHOL |
分类号 |
H01L27/115;H01L27/11;(IPC1-7):H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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