发明名称 |
Peililevy Fabry-Perot-interferometriä varten ja Fabry-Perot-interferometri |
摘要 |
A method for producing a mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - providing a substrate (50), which comprises silicon (Si), - implementing a semi-transparent reflective coating (110) on the substrate (50), - forming a passivated region (70a) in and/or on the substrate (50) by etching a plurality of voids (E1) in the substrate (50), and by passivating the surfaces of the voids (E1), - forming a first sensor electrode (G1a) on top of the passivated region (70a), and - forming a second sensor electrode (G1b) supported by the substrate (50). |
申请公布号 |
FI20155151(A) |
申请公布日期 |
2016.09.10 |
申请号 |
FI20150005151 |
申请日期 |
2015.03.09 |
申请人 |
Teknologian tutkimuskeskus VTT Oy |
发明人 |
VARPULA, Aapo;PRUNNILA, Mika;GRIGORAS, Kestutis |
分类号 |
G01J3/26;G01B9/02;G01J3/45;G02B5/08;G02B26/00 |
主分类号 |
G01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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