Rotation rate sensor with decoupled orthogonal primary and secondary oscillators, esp. of Coriolis micro-mechanical type

摘要

The rotation rate sensor (100) has a base body, a primary oscillator (106) and a secondary oscillator (114). The primary oscillator is held by a primary oscillator hanger (104) to be movable relative to the base body. The secondary oscillator is held by a separate, secondary oscillator hanger (112) movable w.r.t. the primary oscillator. The secondary hanger is formed such that movement applied to the primary oscillator is transferred to the secondary oscillator. The movement of the secondary oscillator caused by the coriolis force is not transmitted back to the primary one. The main surfaces of the primary and secondary oscillators extend in substantially the same plane. The movement of the primary oscillator and/or the secondary oscillator also lies in this plane.