发明名称 LASER IRRADIATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser irradiating device with which laser beams of large pulse width and which is downsized. SOLUTION: A laser irradiating device is provided with laser light sources 11 and 12, a timing controlling device 20, total reflection mirrors 21, 22, 23 and 25, a selective reflection mirror 24 and a laser beam forming part 30. The timing controlling device 20 controls the timing, so that the timing of pulse generation of the laser light source 12 may be later than the pulse-generating timing of the laser light source 11 by a specified time. The laser beam 61 from the laser light source 11 and the laser beam 62 from the laser light source 12 reach in sequence the selective reflection mirror 24 and become a single laser beam 63 of large pulse with which a taught is irradiated.
申请公布号 JPH10125614(A) 申请公布日期 1998.05.15
申请号 JP19960276464 申请日期 1996.10.18
申请人 SEIKO EPSON CORP 发明人 HASHIZUME TSUTOMU
分类号 B01J19/12;C23C16/48;C30B31/20;H01L21/26;H01L21/268;(IPC1-7):H01L21/268 主分类号 B01J19/12
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