| 摘要 |
PROBLEM TO BE SOLVED: To protect a chuck top against shifted loading from a probe unit by combining the chuck top having relatively small dimensions with a movable table having larger dimensions movably in the two-dimensional direction. SOLUTION: When a quadruple liquid crystal substrate 44a is inspected, a movable table 30 mounting the liquid crystal substrate 44a is floated pneumatically. A linear pulse motor built in a chuck top 32 is then driven to move the movable table 30 in XY direction relative to the chuck top 32 so that a liquid crystal panel unit 82 to be inspected comes under a probe unit 84. After the movable table 30 is secured to the chuck top 32 by back pressure, an XYθstage is inched for the purpose of alignment and a probe is brought to contact with the electrode of the liquid crystal panel unit 82.
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