| 摘要 |
PROBLEM TO BE SOLVED: To reliably mount the casing of a turbo molecular pump on a vacuum vessel without causing the increase of a cost and weight weight. SOLUTION: A turbo molecular pump is formed such that a casing is mounted on a support through a mounting jig, a blade body 2 for exhaust and the rotor of a motor are arranged in the casing, and when the blade body 2 for exhaust is broken during rotation, rotation energy of the broken part is transmitted to the casing, but energy by which the casing is about to rotate by the energy is about to break a vacuum vessel is absorbed by an impact buffering mechanism. |
