发明名称 Die transporting device
摘要 A device for transporting a die from a die pick-up position to a die placement position in the process of manufacturing, for instance, semiconductor devices, including a slider which is vertically movable, a suction holding nozzle installed on the slider, a feeder screw which causes a horizontal movement of the slider, a transport guide shaft which guides the slider so as to make its horizontal movement, a pair of pivotal swing levers respectively installed above the die pick-up position and the die placement position so as to guide the slider to ascend and descend, and driving cams which cause the pivot motions of the swing levers.
申请公布号 US5823418(A) 申请公布日期 1998.10.20
申请号 US19960699235 申请日期 1996.08.19
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 NAKAMURA, OSAMU;ARAI, TSUNEHARU
分类号 H01L21/00;H01L21/50;H01L21/52;H01L21/67;H01L21/677;(IPC1-7):H01L21/00 主分类号 H01L21/00
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