| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic field sensor having a very high magnetoresistance change ratio and great magnetoresistance effect multilayer film provided by laminating layers of 10 nm or less with suppressing the mutual, diffusion between the layers on a flexible resin substrate originally difficult for use as a substrate and then doing the device processing. SOLUTION: The method comprises setting on a substrate fixing table a flexible resin substrate having aκ/L value of 1.5×10<3> W/m<2> K or more whereκ, and L are thermal conductivity and thickness of the substrate, and laminating layers of 10 nm or less with cooling the substrate from the substrate fixing table to form a great magnetoresistance effect multilayer film by the vacuum film forming method.
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