发明名称 NUCLEATION METHOD, THIN FILM FORMATION AND NUCLEATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To obtain the membrane that is increased in the membrane formation rate, and has high density with contracted particle sizes and smooth surface, and is resistant to peeling by increasing the nucleation density and enhancing the joint strength between a substrate and the powder particles working as nucleating agent. SOLUTION: The powdery particles whose surfaces are activated are fed toward the surface of the substrate of which the surface is activated thereby maintaining the surfaces of the powdery particles in the activated state and the powdery particles are completely jointed to the substrate. Thus, all over the face of substrate surface, the atoms constituting the substrate and the atoms constituting the powdery particles bond to each other covalently.
申请公布号 JPH11157992(A) 申请公布日期 1999.06.15
申请号 JP19970317255 申请日期 1997.11.18
申请人 KOMATSU LTD 发明人 TERAJIMA KATSUTOMO;YAMAMOTO HIROSHI
分类号 B23B27/14;C23C16/26;C30B29/04;(IPC1-7):C30B29/04 主分类号 B23B27/14
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