| 摘要 |
PCT No. PCT/DE96/00004 Sec. 371 Date Jul. 24, 1997 Sec. 102(e) Date Jul. 24, 1997 PCT Filed Jan. 2, 1996 PCT Pub. No. WO96/23230 PCT Pub. Date Aug. 1, 1996Micromechanical component, wherein there are present, between a movable part (2) and a substrate (1), narrowly bounded spikes or spacers (3) which are composed of dielectric and which prevent the movable part from adhering (sticking) to the opposite surface during production and while the component is being operated during deflection in the direction of the substrate. Said spikes are produced by etching an auxiliary layer between the substrate and the structural layer (2) through etching apertures (4) to such an extent that only the layer components (3) forming such spikes are left behind.
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