| 摘要 |
PROBLEM TO BE SOLVED: To attain miniaturization by lengthening the conveying stroke of a robot hand, and reducing the turning radius. SOLUTION: A conveying device has cassettes 1, 2 for storing boards W, a robot 3 for conveying the substrate W, and at least one handling device 4A, 4B, 4C, 4D (4) for machining the substrate W. The robot 3 is composed of a vertical turning arm body 11 vertically turning on a machine base 12, and a horizontal turning arm body 14 having two sets of arms horizontally turning on a moving machine base 15. The vertical turning arm body 11 moved a hand almost parallel into the vicinity of the cassettes 1, 2 or the treating device 4, and the horizontal turning arm body 15 moves this band into and out of the cassettes 1, 2 or the handling device 4. |
