发明名称 LOW-COST PHOTOPLASTIC CANTILEVER
摘要 <p>A method of manufacturing a cantilever with tip comprising the steps of forming a tip-like indent in a substrate, depositing a photoresist layer which fills said tip-like indent and covers at least a part of said substrate, and photolithographically structuring said photoresist layer to form said cantilever with tip out of said photoresist.</p>
申请公布号 WO1999056176(A1) 申请公布日期 1999.11.04
申请号 IB1999000765 申请日期 1999.04.28
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