Transportable laser detection and ionization device for sampling and analyzing particles in a gas flow used for monitoring clean room ventilation exhaust air

摘要

Device for chemical analysis of individual particles and for characterization of particle populations has a portable vacuum chamber (9), an inlet guide (1) for directing free flying particles, an optical system (2) for guiding and focussing a continuous laser beam (15), and at least one photo-detector (7) able to trigger a pulsed laser beam (16). Dispersed light is detected by photo-detectors (7) and the signals used to trigger the ionizing laser pulses. The ionized particles are detected according to polarity by electrodes (12), registered by an oscilloscope, and the data stored and analyzed by computer.