| 摘要 |
PROBLEM TO BE SOLVED: To obtain a gauge block which is superior in resistance to abrasion and resistance to corrosion, whose size does not changeover aging, and which can be inexpensively manufactured by coating the surfaces of a gauge block main body with diamond-like carbon films (DLC film). SOLUTION: A gauge block main body 1 is a steel base material not subjected to quench hardening, is worked on so that the interval between reference surfaces A may become a desired size D, and is subjected to finish grinding. Next, DLC films 2 are formed of the surfaces of the gauge block main body 1 through the use of a multi-arc system ion plating device. A substrate holder is a self-revolving holder with a main holder and a sub-holder, and the gauge block main body 1 is placed on the sub-holder with the reference surfaces A perpendicular to the sub-holder to form DLC films 2. As the absolute value of the size tolerance between the reference surfaces A differs according to the size of a gauge block, it is necessary to control the thickness of the DLC film approximately in a range from a few nanometers to 200 nanometers for obtaining necessary reference surfaces without final finish-grinding.
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