| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature adjusting plate which can attain the uniform heating/cooling of a substrate and can increase the heating/cooling speed while the manufacturing cost of the substrate is suppressed to an inexpensive value. SOLUTION: A cleaning plate (temperature adjusting plate) 1 is constituted by setting up a placing plate 10 on one heat transfer surface 33a of a thermoelectric module 30 and a heat exchanger 20 on the other heat transfer surface 34a of the module 30. The plate 10 is made of a metal-ceramic composite material and, at the same time, the bolt hole forming sections 10B and recessed section forming section 10C for sensor of the plate 10 are formed of another material (aluminum) having better machinability than the metal-ceramic composite material has.
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