| 摘要 |
PROBLEM TO BE SOLVED: To surely detect even a very small defect or the like regarding a device and a method for inspecting a medium. SOLUTION: A medium inspecting device is designed to detect damage to a storage medium 2 by irradiating the storage medium 2 held on a medium holding part 1 with observing light 8 from a measuring system 3, and reflected light from the storage medium 2. This device is provided with a parallel movement stage 4 for supporting the medium holding part 1 on its upper surface, moving the medium holding part 1 in parallel to a lower plate 4a, and then changing an irradiation position of the observing light 8 onto the storage medium 2, and aθstage 5 for changing an inclined angle of the lower plate 4a of the parallel movement stage 4.
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