| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of the dropping down of an STI end. SOLUTION: Bird's beaks are made to intrude into the space between the active regions of a semiconductor substrate 10 and second polysilicon 20 by using laminated oxidized films 18 existing between the active regions of the substrate 10 and second polysilicon 20. Consequently, the dropping down of an STI end can be prevented even when the STI end retreats at the time of etching off the laminated oxidized film 18 or removing a first peripheral gate oxidized film 46.
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