METHOD FOR FABRICATING VACUUM-PACKED SILICON ANGULAR VELOCITY SENSOR

摘要

PURPOSE: A method for fabricating a vacuum-packed silicon angular velocity sensor is provided to improve the sensitivity by bonding the glass defining a vacuum region with a silicon substrate having a vibrator. CONSTITUTION: An oxide layer(20) and a nitride layer(30) as insulating layers are formed on a silicon substrate(10). The oxide layer(20) having the thickness of 1 micro meter is formed by a wet etch method. The nitride layer(30) having the thickness of 0.3 micro meter grows by a chemical vapor deposition method. A sacrificial layer(40) having the thickness of 1.5 micro meter is grown by a chemical vapor deposition method. The polysilicon for forming a vibrator(50) grows thereon. The polysilicon is etched by using a photo etch method. The vibrator(50) and a driver electrode are formed by removing the sacrificial layer(40). A small-sized angular velocity sensor is formed by boning a glass substrate(60) of a pyrex #7740 with the silicon substrate(10).