| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for producing a compound semiconductor crystal, which are effective to shorten growing time, to reuse used members, to prevent a grown crystal from being cracked and to suppress the formation of dislocation in the crystal. SOLUTION: In the device for producing a compound semiconductor crystal, the change of the amount of cumulative deformation of a ceramic rod 10, which is brought into contact with the upper surface of a quartz cap 4 for closing a PBN crucible 3, can be detected with a displacement sensor 11, when the compound semiconductor crystal is produced by a VB method. Thereby, it becomes possible to confirm the completely solidified state of the crystal, and further it becomes possible to shorten the growth cycle and to reuse members used for growing the crystal.
|
